Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography

Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography

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The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.... x-ray lithography: comparing theory and experiment for gratings, lines and spaces, aquot; Microelectronics Engineering, 17, pp. ... K. Murata, D. F. Keyser, and C. H. Ting, aquot;Monte Carlo simulation of fast secondary electron production in electron beam resists ... 91 (1996). 64. M. C. Peckerar, J. R. Greig, D. J. Nagel, Pechacek, and R. R. Whitlock, aquot;Plasma sources for x-ray ... oxidation of H- passivated Si(100)-2*1 surfaces with an ultrahigh vacuum scanning tunneling microscope, aquot; Appl. Phys.


Title:Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
Author: P. Rai-Choudhury
Publisher:SPIE Press - 1997
ISBN-13:

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