Optical Microlithography

Optical Microlithography

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61 2 Validation of repair process for DUV attenuated phase-shift mask [4000-59] S. W. Pack, H.-B. Kim, C.-N. Ahn, Y.-M. Koo, K.-H. Baik, Hyundai Electronics Industries Co., Ltd. (Korea) 621 Predictive and corrective model for bulk heating distortion in ... of California/Berkeley (USA) 723 Application of an effective wavelet matrix transform approach for optical lithography simulation: analysis of topologicalanbsp;...

Title:Optical Microlithography
Author: Christopher J. Progler, Semiconductor Equipment and Materials International, International SEMATECH (Organization), International SEMATECH.
Publisher:Society of Photo Optical - 2000

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